Scientific Paper
(Invited) Molecular Layer Deposition from Dissolved Precursors
Summary
Molecular layer deposition moved from the gas phase to the liquid: a polyamide film is grown by alternating two complementary, self-limiting surface reactions, with the precursors dissolved in an organic solvent. The approach opens ALD/MLD-style layer-by-layer growth to the many reagents that exist only in solution.
Summary written by the openQCM team. The original abstract is on the publisher’s page.
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