Scientific Paper
Area-Selective Growth of HfS2 Thin Films via Atomic Layer Deposition at Low Temperature Yuanyuan Cao, Tobias Wähler, Hyoungwon Park, Johannes Will, Annemarie Prihoda, Narine Moses Badlyan, Lukas
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Article in Atomic Layer Deposition of Transition Metal Dichalcogenides and Applications in Water Splitting (2021) by Tadahiro Yokosawa Fromm et al. that used the openQCM quartz crystal microbalance.
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