QCM sensors · quartz crystals for the quartz crystal microbalanceThe surfaceis the experiment.
A quartz crystal microbalance reports what happens in the first few hundred nanometres above its electrode. openQCM sensors are 14 mm AT-cut quartz crystals at 5 and 10 MHz, with gold, platinum, stainless steel or silicon dioxide as the sensing surface.
Every sensor is an AT-cut quartz disc, 14 mm across, with a thin film electrode on each face. The front electrode is the sensing surface. It wraps around the edge of the blank, so both electrodes are contacted from the back and the sensing face stays free.
Cross-section, not to scale. The film takes the colour of the surface chosen above.
To scale
If the 0.33 mm of a 5 MHz quartz blank were as wide as this line, the 200 nm electrode film would be the hairline at its left end: about one part in 1600. That film is the whole experiment.
Thickness shear
The crystal shears.
An alternating voltage across the electrodes drives the quartz into a thickness shear resonance. Material that binds to the sensing surface moves with the crystal and lowers the resonance frequency.
For a thin, rigid layer the frequency change is proportional to the added mass per unit area. C is 17.7 ng cm⁻² Hz⁻¹ at 5 MHz and 4.42 ng cm⁻² Hz⁻¹ at 10 MHz; n is the overtone number.
In liquid the shear wave decays within about 250 nm at 5 MHz and 180 nm at 10 MHz. Soft layers such as proteins, polymers or cells also dissipate energy, which is why frequency and dissipation are measured together.
The electrode is the surface your molecules meet. Choose the one your sample would meet outside the instrument: a noble metal, a working steel, or glass.
01 / Au
Gold
The general purpose surface: thiol monolayers, biosensing, protein and polymer adsorption, electrochemistry. Chemically noble.
A 10 MHz crystal has four times the mass sensitivity of a 5 MHz crystal. A 5 MHz crystal is twice as thick and easier to handle.
5 MHz
17.7ng cm⁻² Hz⁻¹
blank ≈ 0.33 mm
10 MHz
4.42ng cm⁻² Hz⁻¹
blank ≈ 0.17 mm
5 MHz and 10 MHz at a glance
5 MHz
10 MHz
Mass sensitivity (Sauerbrey, n = 1)
17.7 ng cm⁻² Hz⁻¹
4.42 ng cm⁻² Hz⁻¹
Nominal blank thickness
≈ 0.33 mm
≈ 0.17 mm
Decay length of the shear wave in water
about 250 nm
about 180 nm
Frequency shift in water near 25 °C
about +8 Hz/°C
about +23 Hz/°C
Overtones read by openQCM Q-1 and NEXT
up to n = 9
up to n = 5
12 / 5 mm
A large sensing electrode, for liquid cells.
A 12 mm front electrode and a 5 mm back electrode. The whole wetted area of the measurement chamber sits on the film.
6 / 6 mm, symmetric
Two equal electrodes, for gas and vacuum.
Symmetric 6 mm electrodes for gas phase, vacuum and thin film work, with an orientation flat on the blank so every sensor is mounted with the same orientation of the cut.
Every sensor
One blank, every instrument.
AT cut at 35° 15′, plano-plano, polished, 14 mm. The same blank fits openQCM NEXT, Q-1 and Wi2, and holders built for 14 mm Q-Sense type sensors.
04 / The range
Nine sensors, line by line.
The same rows for every sensor, so they can be compared. Values are those of the data sheets, version 1.0 of 11 November 2026; prices are read from the store once a day, VAT excluded.
All sensors: AT-cut quartz, 14 mm, fundamental mode, wrapped electrodes with single side contact, titanium adhesion layer, frequency tolerance ± 5 kHz (± 7 kHz for SS304). Resonance resistance, shunt capacitance and the values still being measured are in each data sheet.
05 / Cleaning and care
Clean it like the film it is.
The sensing film is about 200 nm thick, on 10 nm of titanium. A treatment that restores gold can strip a stainless steel film or dissolve a silica layer, so every surface has its own procedure. Each step in the data sheets cites the work it comes from.
Six rules for every sensor
Hold it by the edge. Plastic tipped tweezers and powder free nitrile gloves. Never touch or wipe the electrodes or the wrapped contact.
Dry from the centre outwards with filtered, oil free nitrogen. A droplet left to evaporate leaves a ring of residue.
Finger tight only. Clamping force shifts the resonance: three point clamping moved 10 MHz crystals by up to 3 ppm.
Wait for the baseline. Swelling O-rings and contact pressure cause slow drift in the first minutes after mounting.
No ultrasonic bath. Cavitation is itself used as a delamination test for sub-micrometre coatings.
One pretreatment per series. Different cleaning methods give different surface states, and different sensor responses.
What each surface can take.
SafeCautionAvoidNeverNot rated
Treatment
Gold
Platinum
Stainless steel
Silicon dioxide
Water, ethanol, isopropanol, acetone
No measurable etching of gold, titanium, chromium or quartz.
No measurable etching of platinum, titanium or chromium.
Compatible. Use ultrapure water, free of chloride.
No etching of silica, titanium, chromium or gold.
UV/ozone
Up to 30 min. It leaves a thin gold oxide: 20 min in absolute ethanol reduces it.
At no more than 80 °C.
Short, 5 to 10 min, followed by a water rinse. A long exposure changes the oxide and the wetting.
Removes organics and does not etch the oxide.
Oxygen plasma
Low power and short: 22 W for 85 s caused no damage on openQCM sensors.
Forms platinum oxide or roughens the surface.
Forms Cr(VI) and changes oxide and wetting. Argon plasma is the safe choice on steel.
Removes organics and does not etch the oxide.
Chloride media: PBS, saline, cell media
Only under anodic potential: chloride then corrodes thin gold.
Under anodic polarization, traces of chloride increase platinum dissolution.
For the duration of the experiment only, then rinse. Never store the sensor in it.
Neutral buffers are the standard media for bilayers on silica.
Dilute NaOH or KOH
50 mM KOH for cyclic voltammetry, within the potential limits of the data sheet.
Short contact only: alkali dissolves quartz faster at higher pH and temperature.
0.1 to 0.25 M NaOH, up to 50 °C, up to 15 min: it removes proteins.
–
Hydrogen peroxide and its mixtures
Hot H₂O₂ etches chromium at 110 nm/min: avoid it on chromium adhesion layers.
Especially warm: it etches chromium at 110 nm/min at 50 °C.
–
NH₄OH/H₂O₂ mixtures undercut titanium and chromium at the edges.
Hot or concentrated NaOH and KOH
Etches the quartz and softens the titanium.
–
Above 0.25 M or above 50 °C it etches the quartz and softens the titanium.
30 % KOH at 80 °C removes 50 nm of deposited silica in a few minutes.
Hydrochloric acid
–
Hot, with oxidants (Cl₂, H₂O₂, HNO₃), it dissolves platinum.
Also HCl-based descalers and FeCl₃, the solution used to induce pitting in corrosion tests.
Dilute and short only: it does not etch silica, but the adhesion metal is exposed at the edges.
Acid piranha
Titanium at 240 nm/min. It caused the largest loss of performance on openQCM sensors.
Titanium at 240 nm/min: it undercuts the adhesion layer.
Etches nickel quickly and undercuts the titanium.
It does not etch silica or gold, but undercuts the electrode at edges and pinholes.
Aqua regia, also diluted
Dissolves gold at 680 nm/min.
Etches platinum at 3.6 nm/min at 30 °C, faster when hot.
–
Dissolves the gold underneath through pinholes and edges.
HF and fluorides
Titanium at 1100 nm/min, and it etches the quartz.
Titanium at 1100 nm/min in 10:1 HF, and it etches the quartz.
Attacks titanium and quartz.
10:1 HF removes the 50 nm of silica in about 2 min.
Ultrasonic bath
Cavitation is itself used as a delamination test for sub-micrometre coatings.
Cavitation is itself used as a delamination test for sub-micrometre coatings.
Degrease by immersion instead of ultrasound.
Cavitation damages polished surfaces.
Abrasives, polishing, wiping
They remove the 200 nm film.
They remove the 200 nm film.
They remove the 200 nm film.
They remove the film.
Select a rating to read the reason. Safe: no measurable effect in the conditions given. Caution: usable within the stated limits. Avoid: damages part of the sensor. Never: destroys the film, the adhesion layer or the quartz. Etch rates from Williams, Gupta and Wasilik (2003).
Three levels, gentlest first.
Gold
Gold is noble, but a clean gold surface takes up hydrocarbons from the air within minutes and binds sulfur compounds and proteins strongly.
Level 1 · between measurements
Flush with buffer, then ultrapure water. Rinse the gold face with ethanol or isopropanol, then water. For protein residues, 10 to 15 min in alkaline SDS (pH 11) at room temperature. Dry with nitrogen.
Level 2 · before use
Solvent rinse, then a low power oxygen plasma (about 20 W, 60 to 90 s) or UV/ozone for 15 to 30 min, then 20 min in absolute ethanol to reduce the gold oxide. With a potentiostat: 10 cathodic sweeps in 50 mM KOH.
Level 3 · deep cleaning
Thiol monolayers: reductive desorption in 0.5 M KOH, or 0.5 M NaBH₄ for 10 min. Proteins: alkaline SDS, then plasma or the electrochemical sequence. Acid piranha is the last resort: expect to lose the sensor.
Platinum withstands strong oxidation, but it dissolves slowly under potential cycling above 1.15 V, and a dissolved monolayer shows as a frequency drift.
Level 1 · between measurements
Rinse with the measurement solvent or buffer, then ultrapure water; ethanol or isopropanol after organic or gas phase work. Dry with nitrogen or argon. With a potentiostat: 10 to 20 cycles between 0.05 and 1.20 V in deaerated 0.5 M H₂SO₄.
Level 2 · before use
Acetone for 10 to 30 min, then isopropanol and water. Optionally UV/ozone for 10 to 20 min at no more than 80 °C. Electrochemical activation in 0.5 M H₂SO₄ or 0.1 M HClO₄ until consecutive voltammograms overlap.
Level 3 · deep cleaning
Solvent soak for up to 1 h, UV/ozone two or three times with a water rinse in between, then potential cycling. Carbon monoxide, sulfur and metal adatoms each have their own anodic treatment. Never flame anneal.
A sputtered steel film forms a uniform passive layer. PBS carries about 4900 mg/L of chloride: rinse it out after every run and never store the sensor in it.
Level 1 · between measurements
Flush with the running buffer, then ultrapure water for 5 min. Protein or soft soil: 0.1 M NaOH at 20 to 40 °C for 10 min, then water. Optionally a rinse in 0.5 to 1 % HNO₃ or 1 to 2 % citric acid.
Level 2 · before use
Acetone, then isopropanol, 5 to 7 min each, by immersion. 0.1 M NaOH or a chloride-free alkaline detergent for 10 to 15 min. Then argon plasma for a few minutes at low power, or UV/ozone for 5 to 10 min. Rinse with water before mounting.
Level 3 · deep cleaning
Proteins and biofilms: enzymatic detergent at 40 to 50 °C, then 0.25 M NaOH. Mineral scale: 1 % HNO₃ or 2 to 5 % citric acid. Citric acid re-passivation only after exposure to chloride. Never hydrochloric acid.
The silica layer is about 50 nm thick and deposited, not grown: fluoride and hot alkali consume it quickly. Losing 1 nm shows as about +12 Hz.
Level 1 · between measurements
Flush the buffer out with ultrapure water. To remove a lipid layer: 2 % Hellmanex III at 20 to 25 °C for 10 min, or ethanol or isopropanol for 5 to 10 min. Flush with water for at least 10 min, rinse and dry with nitrogen.
Level 2 · before use
Solvent rinse, then 2 % Hellmanex III at 20 to 35 °C for 10 to 30 min, without ultrasound. Rinse both faces. Activate with oxygen or air plasma for 1 to 2 min, or UV/ozone for 10 to 20 min. Use within 30 to 60 min.
Level 3 · deep cleaning
Lipids: Hellmanex at 30 to 35 °C for 30 min, then a longer plasma or UV/ozone. Proteins: enzymatic detergent for 30 to 60 min. Polymers: a good solvent, then oxygen plasma. Piranha is not recommended.
On openQCM 10 MHz gold sensors, three regeneration cycles reduced the sensor performance by 7 % with electrochemical cleaning, 16 % with oxygen plasma and 25 % with piranha (Wasilewski et al., 2022). Always start with the lowest level that restores the baseline.
Electrochemical7 %
Oxygen plasma16 %
Piranha25 %
Replace the sensor when
the quartz edge is cracked or chipped, or the electrode is scratched;
the electrode peels, seen from the contact side, or stays discoloured;
the baseline is noisy or the motional resistance has risen;
the frequency in air drifts from one cleaning to the next;
the cleanliness test of its data sheet no longer passes.
Record the frequency in air of every new sensor and after each deep cleaning: comparing the values is the simplest way to follow the electrode.
06 / Documents
The data sheets.
Specification, drawings, three levels of cleaning, a chemical compatibility table and the literature behind every step, for each sensor. The catalogue of the whole range asks only who is reading.
G. Sauerbrey, Verwendung von Schwingquarzen zur Wägung dünner Schichten und zur Mikrowägung, Zeitschrift für Physik 155, 206–222 (1959). doi:10.1007/BF01337937
K. K. Kanazawa, J. G. Gordon, The oscillation frequency of a quartz resonator in contact with liquid, Analytica Chimica Acta 175, 99–105 (1985). doi:10.1016/S0003-2670(00)82721-X
D. Johannsmann, The Quartz Crystal Microbalance in Soft Matter Research, Springer (2015). doi:10.1007/978-3-319-07836-6
K. R. Williams, K. Gupta, M. Wasilik, Etch rates for micromachining processing, Part II, Journal of Microelectromechanical Systems 12, 761–778 (2003). doi:10.1109/JMEMS.2003.820936
T. Wasilewski et al., Development and Assessment of Regeneration Methods for Peptide-Based QCM Biosensors in VOCs Analysis Applications, Biosensors 12, 309 (2022). doi:10.3390/bios12050309
D. Scaccabarozzi et al., Measurement of the Instrumental Effect Caused by Flexure Clamping on Quartz Crystal Microbalances, Applied Sciences 15, 9261 (2025). doi:10.3390/app15179261
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